Key Equipment Location
1. Vision RIE 2
2. Cambridge NanoTech Plasma ALD
3. STS HRM ICP
4. Denton Discovery RF/DC Sputterer
5. Denton Explorer - E-beam Evaporator
6. Unifilm Sputterer
7. CHA E-beam Evaporator
8. Hitachi S-4700 FE-SEM
9. Karl Suss TSA MA-6 Mask Aligner
10. Heidelberg MLA150 no.2 (375)
11. Heidelberg MLA150 no.1 (375/405)
12. Elionix ELS-G100 EBL System
13. SCS G3P8 Spin Coater
14. Karl Suss SB6 Bonder
15. CVD FirstNano SiGe Nanowire Furnace
16. Aixtron Black Magic PECVD
17. Tystar Mini Tube Furnace
18. STS PECVD 3
19. MRL Furnace
20. CMOS Cleaning Station