Equipment Description
The Denton Discovery 2 is an RF/DC sputterer capable of high temperature processing and RF bias on the platen. It currently has 4 guns, 3 of which are RF and 1 DC. Specifications: -turbo and cryo pumped (5e-6 Torr) -sample heater 600C max.
Standard Metal Materials Available:
Manufacturer: CHA Industries
Model Number: Discovery-18
| Institute |
Georgia Tech |
| Department |
IEN - Micro/Nano Fabrication Facility |
Sub Tool Of  |
Marcus Inorganic Cleanroom |
| |
Machine Specifications and Data:
Power Specifications:
- RF/DC power
- 3 RF guns
- 1 DC gun
- Sample heater: 600 C max