The CtrLayer SDS - Sputtering System is an in-house fabricated deposition tool. It uses a calibration algorithm to generate recipes that maintain a high uniformity despite a small target and short target to substrate distance.

Standard Metal Materials Availalable:

 

 

 

 

 

 

 

 

 

 

 

Institute	Georgia Tech
Department	IEN - Micro/Nano Fabrication Facility
Sub Tool Of	Marcus Inorganic Cleanroom