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Processing
1. New User Preparation
2. Processing Basics
3. Recipe Library
4. Processing Procedure
5. Process/Equipment Selection
6. Processing Materials
6.1 Photoresists
6.1.1 SC1813
6.1.2 SC1827
6.1.3 SPR220-7.0
6.1.4 NR9-1500py
6.2 Developers
6.3 Resist Stripper
6.4 Solvents
6.5 Acids
6.6 Bases
6.7 Oxidizers
7. Equipment Baseline
8. Processing Safety
9. Request Help
A. System Contamination Control Policy
6.1.1 SC1813
Related Media
MSDS MICROPOSIT SC1813
Contact Information
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332
For process support please click below
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