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Processing
1. New User Preparation
2. Processing Basics
3. Recipe Library
4. Processing Procedure
5. Process/Equipment Selection
6. Processing Materials
6.1 Photoresists
6.2 Developers
6.3 Resist Stripper
6.4 Solvents
6.5 Acids
6.6 Bases
6.6.1 NH3·H2O
6.6.2 KOH Solution
6.7 Oxidizers
7. Equipment Baseline
8. Processing Safety
9. Request Help
A. System Contamination Control Policy
6.6.1 NH3·H2O
Contact Information
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332
For process support please click below
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