IMS- Micro/Nano Fabrication Facility
M: Surface Properties

Surface properties can be used in various ways. For example, often a quick check to see if a native oxide is removed from a silicon wafer is to run di water over it. Typically (unless specifically treated), di water will bead as it runs across the pure silicon (hydroboic nature) while any silicon oxide would cause the water to hug the surface (hydrophillic nature).  The contact angle can be used as a good indicator for if a surface is actually clean.

Tool

Pro's (+) 

Cons (-)

Contact Angle Measurement System (Cleanroom - Marcus Organic)     
     
Hysitron TriboIndenter (Marcus Microscopy)    
     
IONTOF Time-of-Flight SIMS (Marcus Microscopy) 

 

 
     
Q-sense QCM-D (Cleanroom - Marcus Organic)  viscosity, elasticity, and thickness of any soft film  
     
SemiTest SCA-2500 Surface Charge Analyzer (Cleanroom - Pettit)     
     
Thermo K-Alpha XPS (Marcus Microscopy)    
     
Veeco AFM (Marcus Microscopy)     
Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu