Login
Select Login Portal
IMS- Micro/Nano Fabrication Facility
Become a User
Services
Capabilities
Safety
Processing
Rates
Contact
SUMS Home
Search
Login
Select Login Portal
Processing from test server
Equipment Baseline
Baseline Reports 2019 4th quarter
Baseline Reports 2020 1st Quarter
Process Support Team
Processing Fundamentals
Processing Information
Recipe Library
Equipment Baseline
Baseline Reports
Reports 2019 4th Quarter
Reports 2020 1st Quarter
Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu
Loading