IMS- Micro/Nano Fabrication Facility
Processing Information

Convient processing hyperlinks are under the "Related Links."

This page contains processing general theory information, chemical etching infomation and materials available in the cleanroom. Links to recipes for the various pieces of equipment and chemical information are on other sections of the website.

Please note for the pdf's if you click inside the pdf, the search function "control" & "F" does work.

The best way to view the PowerPoint slides are to view in a new window (bottom right corner option) and to have the "notes" on (bottom right corner option after open in new window).

 


 
   
 

Substrate Cleaning 

 
   
 

Hot Processing and Ion Implantation

 
   
 

Lithography

 
   
 

Etching Information

 
   
 

Deposition Methods

 
   
 

Backend Processing & Packaging

 
   
 

Metrology