These modules are standardized procedures for various tasks accomplished in the cleanroom. Each module consists of list of necessary supplies and the procedures that should be followed during that processing step. We have also tried to include common mistakes and questions about each processing step. These procedures should help with repeatability in our facility and help you standardize your process. Both new and old users show find this information useful.
Example document of a process flow.
If you want to bring a material (targets, source materials, gases, chemicals) in to the cleanroom, please fill out this form. Thank you.
in terms of processing
To avoid cross contamination, supply your own items.
Georgia Tech access only -put your gatech e-mail as the user name microsoft will redirect to GT login.