IMS- Micro/Nano Fabrication Facility
Basic Cleanroom Guides

Process Modules

These modules are standardized procedures for various tasks accomplished in the cleanroom. Each module consists of list of necessary supplies and the procedures that should be followed during that processing step. We have also tried to include common mistakes and questions about each processing step. These procedures should help with repeatability in our facility and help you standardize your process. Both new and old users show find this information useful.

Example process flow 

Example document of a process flow.

New Material Use Form

If you want to bring a material (targets, source materials, gases, chemicals) in to the cleanroom, please fill out this form. Thank you.

Metrology Options 

in terms of processing

Common Supply List 

To avoid cross contamination, supply your own items.

Previous Guide and technical presentations  

Georgia Tech access only -put your gatech e-mail as the user name microsoft will redirect to GT login.

 

 

Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu