IEN - Micro/Nano Fabrication Facility

Soft Lithography 

The Organic Cleanroom houses the Soft lithography Bay. This bay contains equipment specifically designed equipment for Soft Lithography fabrication. Soft lithography is a complementary extension of photolithography and is based on rapid prototyping using negative photoresist SU-8, and on replica molding of poly(dimethylsiloxane) (PDMS) onto the SU-8 film patterned by UV lithography. Due to its unique advantages such as low cost, compatible with large or non-planar surfaces, bio-compatible, etc., it has found its application in many area such as micro-and nanoscale patterning, nano functional devices (OLED, optical transducer, optical waveguide, etc.), and especially in biological researches.


         MJB4 Mask Aligner                              Technics RIE                                        Spin Coater


Contact Information
Dr. Jie Xu
Senior Research Scientist

Blake Cotney
Graduate Research Assistant

Erin C. Prowett
Research Scientist