IMS- Micro/Nano Fabrication Facility
Standard Recipes

Lithography

Dry Etch - Plasma Etch

Dry Etch - Chemical Vapor Etch

Wet Etch

CVD - PECVD

CVD - ALD

CVD - APCVD

CVD - LPCVD

PVD - Evaporation

PVD - Sputtering

Thermal Oxidation

Solid Source Doping