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Metal Etchants
Metal
Temperature
Etchant
Ratio
Aluminum
H
2
O/HF
1:1
HCl/HNO
3
/HF
1:1:1
Antimony
H
2
O/HCl/HNO
3
1:1:1
H
2
O/HF/HNO
3
90:1:10
Bismuth
H
2
O/HCl
10:1
Chromium
H
2
O/H
2
O
2
3:1
Cobalt
H
2
O/HNO
3
1:1
HCI/H
2
O
2
3:1
Copper
H
2
O/HNO
3
1:5
Gold
Hot
HCl/HNO
3
3:1
Hafnium
H
2
O/HF/H
2
O
2
20:1:1
Indium
Hot
HCl/HNO
3
3:1
Iridium
Hot
HCl/HNO
3
3:1
Iron
H
2
O/HCl
1:1
H
2
O/HNO
3
1:1
Lead
Acetic/H
2
O
2
1:1
Magnesium
Hot
H
2
O/NaOH
10:1 by weight
Followed by
H
2
O/CrO
3
5:1 by weight
Molybdenum
HCI/H
2
O
2
1:1
Nickel
HNO
3
/Acetic/Acetone
1:1:1
HF/HNO
3
1:1
Niobium
HF/HNO
3
1:1
Palladium
Hot
HCl/HNO
3
3:1
Platinum
Hot
HCl/HNO
3
3:1
Rhenium
Hot
HCl/HNO
3
3:1
Rhodium
Hot
HCl/HNO
3
3:1
Ruthenium
Hot
HCl/HNO
3
3:1
Silver
NH
3
OH/H
2
O
2
1:1
Tantalum
HF/HNO
3
1:1
Tin
HF/HCl
1:1
HF/HNO
3
1:1
HF/H
2
O
1:1
Titanium
H
2
O/HF/HNO
3
50:1:1
H
2
O/HF/H
2
O
2
20:1:1
Tungsten
HF/HNO
3
1:1
Vanadium
H
2
O/HNO
3
1:1
HF/HNO
3
1:1
Zirconium
H
2
O/HF/HNO
3
50:1:1
H
2
O/HF/H
2
O
2
20:1:1
Related Media
Al Etch Type A, Cu 100/200, Cr-14,Au:TFA
Metal Etchants Pdf
Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu
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