The chemicals listed in the tables below are common chemicals (i.e. photoresist, developers, acids, etchants, bases, & solvents) found in IEN cleanroom facilities. For a more comprehensive list for chemicals and associated files (e.g. SDS, technical datasheets) please refer to the chemical section in IEN department chemical tab on SUMS page. Manufacturer's websites are also good references to find out more specific processing information.
Understand the possible reactions when mixing chemicals.
Many processing steps require mixing liquid chemicals together. Users should make themselves aware of the chemical reactions possible when mixing chemicals in order to minimize the risk to themselves and others around.
For example, always add acids to water. Adding water to an acid causes a highly exothermic reaction which can cause a fire and release dangerous gases into the air.
Photoresists/Primer
Resist/Primer |
Manufacturer |
Provided |
Cabinet Location |
HMDS/Microposit Primer- P20 |
Microchem Corp. |
Yes |
Solvent - amber contianer |
SPR 220 |
Microchem Corp. |
Yes |
Solvent - amber contianer |
SC 1813 Positive Photoresist |
Microchem Corp. |
Yes |
Solvent - amber contianer |
SC 1827 Positive Photoresist |
Microchem Corp. |
Yes |
Solvent - amber contianer |
NR71-3000P Negative Photoresist |
Futurrex, Inc. |
Yes |
Solvent - amber contianer |
NR9-1500PY Negative Photoresit |
Futurrex, Inc. |
Yes |
Solvent - amber contianer |
SU-8 |
Microchem Corp. |
No |
Solvent |
Developers
Developers |
Manufacturer |
Provided |
Cabinet Location |
1165 Remover |
Microchem Corp. |
No |
Solvent |
MF-319 Developer |
Microchem Corp. |
Yes |
Base |
351 Developer |
Microchem Corp. |
Yes |
Base |
Resist Developer RD6 |
Futurrex, Inc. |
No |
|
Acid
Acid |
Manufacturer |
Provided |
Cabinet Location |
Acetic Acid |
Brenntag |
Yes |
Acid |
Hydrochloric Acid |
Brenntag |
Yes |
Acid |
Hydrofuric Acid |
Brenntag |
Yes |
Acid |
Nitric Acid |
Brenntag |
Yes |
Acid |
Sulfuric Acid |
Brenntag |
Yes |
Acid |
Phosphoric Acid |
Brenntag |
Yes |
Acid |
Etchants
Etchant |
Manufacturer |
Provided |
Cabinet Location |
Aluminum Etchant Type A |
Brenntag |
Yes |
|
Buffered Oxide Etch (6:1) |
Brenntag |
Yes |
|
Chromium Etchant |
Brenntag |
Yes |
|
.
Bases
Developers |
Manufacturer |
Provided |
Cabinet Location |
Ammonium Hydroxide |
Brenntag |
Yes |
Base |
Hydrogen Peroxide |
Brenntag |
Yes |
Base |
Potassium Hydroxide (30%) |
Doe & Ingalls |
Yes |
Base |
Solvents
Solvent |
Manufacturer |
Provided |
Cabinet Location |
Acetone |
Brenntag |
Yes |
Solvent |
Isopropanol |
Brenntag |
Yes |
Solvent |
Methanol |
Brenntag |
Yes |
Solvent |
Trichloroethylene |
Brenntag |
Yes |
Solvent |