Etch Rate for Resists, Parylene, Polyimdes (nm/min)
| |
S1800 Positive Reist |
Furrex Negative Reist |
Parylene C |
Polyimde |
| Piranha |
>92,000 |
>59,000 |
2.6 |
>17,000 |
| MicroStripper |
>94,000 |
>60,000 |
N/A |
520 |
| Acetone |
>176,000 |
>87,000 |
0.77 |
0 |
*Cited from JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 12, NO. 6, DECEMBER 2003