ALD Plasma ZnO2 -

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IMS- Micro/Nano Fabrication Facility

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Processing

Equipment Baseline

Baseline Reports 2019 4th quarter

Baseline Reports-old

ALD oxide chamber HfO2 150C

ALD oxide chamber HfO2 250C 2019-1

ALD oxide chamber plasma SiO2 150C

ALD oxide chamber Plasma TiO2 250C 2019-2

ALD oxide chamber Thermal TiO2 150C 2019-1

ALD oxide thermal Al2O3 250C 2019

ALD Plasma ZnO2

ALD Thermal ZnO2

Baseline report for ALD metal chamber plasma SiO2 150C

Baseline report for ALD metal chamber plasma TiO2 250C

Baseline report for ALD oxide chamber plasma TiO2 250C after cleaning

Cambridge ALD Metal Chamber

Cambridge ALD Metal Chamber plasma SnO2

Cambridge ALD Oxide Chamber

Photolithography

Thermal Furnaces

Baseline Reports 2020 1st Quarter

Process Support Team

Processing Fundamentals

Processing Information

ALD Plasma ZnO2

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