Baseline Reports 2020 1st Quarter
| Equipment |
Recipe |
Engineer |
Date |
Download Link |
|
|
|
|
|
| STS Pegasus ICP |
Standard Deep Si Etch |
|
|
Report |
| STS ICP |
Mod1 |
Durga Gajula |
2020-03-20 |
Report |
| Plasma-Therm ICP |
Standard SiO2 |
|
|
Report |
| Oxford End-Point RIE |
Standard Oxide Etch |
|
|
Report |
| Unaxis RIE |
Std_Ox |
|
|
Report |
| Vision RIE #1 |
Standard Oxide |
|
|
Report |
| Ctrlayer RIE #2 |
Standard SiO2 |
|
|
Report |
| STS HRM-ICP |
GENMEMS |
|
|
Report |
| PVD75 RF Sputterer |
Ti |
|
|
Report |
| Denton Discovery RD/DC Sputter |
TiN |
|
|
Report |
| SCS G3P8 Spinner |
Spin Curves |
|
|
Report |
| Cambridge Fiji ALD - metal chamber |
Thermal TiO2 |
|
|
Report |
| Cambridge Fiji ALD - metal chamber |
Plasma TiO2 |
|
|
Report |
| Cambridge Fiji ALD - metal chamber |
Thermal Al2O3 |
|
|
Report |
| Cambridge Fiji ALD - metal chamber |
Plasma Al2O3 |
|
|
Report |
| Cambridge Fiji ALD - metal chamber |
Thermal HfO2 |
|
|
Report |
| Cambridge Fiji ALD - metal chamber |
Plasma HfO2 |
|
|
Report |
| Cambridge Fiji ALD - oxide chamber |
Plasma SiO2 |
|
|
Report |
| Oxford ICP-PECVD |
Standard SiO2 |
|
|
Report |
| Oxford ICP-PECVD |
Standard SiN |
|
|
Report |
| STS PECVD 3 |
Standard SiO2 |
|
|
Report |
| STS PECVD 3 |
Standard SiN |
|
|
Report |
| Unaxis PECVD |
Std_Ox |
|
|
Report |