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1. New User Preparation
2. Processing Basics
3. Recipe Library
4. Processing Procedure
5. Process/Equipment Selection
6. Processing Materials
6.1 Photoresists
6.1.5 NR71-3000p
6.1.6 SU-8
6.2 Developers
6.3 Resist Stripper
6.4 Solvents
6.5 Acids
6.6 Bases
6.7 Oxidizers
7. Equipment Baseline
8. Processing Safety
9. Request Help
A. System Contamination Control Policy
6.1.5 NR71-3000p
Related Media
MSDS NR71 3000
Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu
https://cleanroom.gatech.edu
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