Spin Coating -

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IMS- Micro/Nano Fabrication Facility

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Processing

Equipment Baseline

Process Support Team

Processing Fundamentals

Etching Process

Resist Information

Substrate Cleaning

Thermal Processing

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Spin Coating

EVG 101 Spin Coater

Karl Suss RC8 Spin Coater

Karl Suss RC8 Spin Coater - Inorganic

SCS G3P8 Spin Coater 1 (small pieces)

SCS G3P8 Spin Coater 2

SCS G3P8 Spin Coater 3

SCS G3P8 Spin Coater 4

Suss AltaSpray Spray

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