IEN - Micro/Nano Fabrication Facility
6.8 Processing Gases

The GT IEN cleanroom has a large variety of processing gases that are available for use. Gases have been distributed among the individual tools in an effort to maximize the flexibility of the tool set and to give users the ability to segregate processes on the tools. The chart below details the process gases available on tools vs. the materials to be processed.


Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 |