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1. New User Preparation
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6. Processing Materials
6.8 Processing Gases
6.9A Metal Coatings
6.9B Dielectric Coatings
7. Equipment Baseline
8. Processing Safety
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A. System Contamination Control Policy
6.9B Dielectric Coatings
Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu
https://cleanroom.gatech.edu
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