Login
Select Login Portal
IMS- Micro/Nano Fabrication Facility
Become a User
Services
Capabilities
Safety
Processing
Rates
Contact
SUMS Home
Search
Login
Select Login Portal
Test
1. New User Preparation
2. Processing Basics
3. Recipe Library
4. Processing Procedure
5. Process/Equipment Selection
6. Processing Materials
6.8 Processing Gases
6.9A Metal Coatings
6.9B Dielectric Coatings
7. Equipment Baseline
8. Processing Safety
9. Request Help
A. System Contamination Control Policy
6.9A Metal Coatings
Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu
https://cleanroom.gatech.edu
Loading