STS PECVD 3 SiO2 2019-1 -

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IMS- Micro/Nano Fabrication Facility

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Processing

Equipment Baseline

Baseline Reports 2019 4th quarter

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STS PECVD 3 SiNx 2019-1

STS PECVD 3 SiO2 2019-1

Unaxis PECVD SiO2 2019-1

Photolithography

Thermal Furnaces

Baseline Reports 2020 1st Quarter

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STS PECVD 3 SiO2 2019-1

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