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ALD thin film
Materials >Deposition tools
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Plating Methods
Electroplating is used to create thicker films at a faster deposition rate compared to CVD and PVD.
Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu
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