AZ 5200 i-Line Photoresist -

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IMS- Micro/Nano Fabrication Facility

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Processing

Equipment Baseline

Process Support Team

Processing Fundamentals

Etching Process

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AZ Electronic Materials

AZ 300 MIF Developer

AZ 400K, 351, 421K Developers

AZ 5200 i-Line Photoresist

AZ 5214 Photoresist

AZ P4000 Thick Film Photoresist

Futurrex Inc. Photolithography Chemicals

Shipley Co. Photolithography

Substrate Cleaning

Thermal Processing

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AZ 5200 i-Line Photoresist

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