IMS- Micro/Nano Fabrication Facility
Solvent Clean

Procedure


  1. Locate the fume hood you want to use. Make sure there is no Piranha solution or hotplate being used in the fume hood and that there is a solvent waste jar/drain available. Fill out a chemical warning label, and place it in your work area.
  2. Put the glass beaker, texwipes and solvent bottles in your area
  3. Grip the substrate with the tweezers at the edge, and hold it firmly above the beaker. Twist the substrate at an angle so that the solvent can flow along the substrate surface.
  4. Gently rinse the substrate surface with acetone from the higher edge. Try to cover all of the substrate area (both front and back sides). Make sure there is no spilling. Soak the entire substrate in acetone for a few minutes if needed. Make sure there is enough acetone to completely submerge the substrate and cover the beaker with a watch glass.
  5. Put the substrate on a texwipe and rinse the tweezers with acetone. Thoroughly rinse the teeth of the tweezers that came into contact with the substrate surface.
  6. Pick up the substrate with the tweezers at a different spot. Rinse the whole substrate with acetone again.
  7. While still holding the substrate, rinse the substrate with methanol or IPA.
  8. Place the substrate on to a texwipe. Rinse the tweezers with methanol/IPA.
  9. Pick up the substrate with the tweezers at a different spot. Rinse the substrate with methanol/IPA again.
  10. Move substrate above a texwipe, blow dry it with a nitrogen gun, and put it back into its box.
  11. Pour solvent contained in the beaker into the solvent waste jar/drain, rinse it with IPA, and blow dry it with a nitrogen gun.
  12. Clean up the work area, and remove the texwipe and the chemical warning label.
  13. Return all the solvent bottles to the storage shelf.