IMS- Micro/Nano Fabrication Facility
Semi Insulating Polycrystalline Silicon
Temperature (°C)
700 - 850
Pressure (mT)
200 - 400
Gas 1 (sccm)
N2O - 100
Gas 2 (sccm)
SiH4: 10 - 25
Refractive Index
1.45
Rate (Å/min)
50 - 100
Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269 
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