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Processing
Equipment Baseline
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Processing Fundamentals
Doping Process
Etching Process
Lithography
Metrology
Substrate Cleaning
Thermal Processing
Annealing/Sintering
Tystar Furnace Annealing/Sintering
Film Growth
Thin Film
Processing Information
Recipe Library
Tystar Furnace Annealing/Sintering
Equipment
Tystar Furnace
Temperature (°C)
250 - 700
700 - 1350
Pressure (mT)
atm
Gas (sccm)
Forming Gas
3000 - 10000
N
2
3000 - 10000
O
2
3000 - 10000
Ar
3000 - 10000
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