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IMS- Micro/Nano Fabrication Facility

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Processing

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Processing Fundamentals

Etching Process

Ellipsometer Equipment

Profilometer Equipment

Film Uniformity

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Surface Properties

Substrate Cleaning

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Processing Information

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Dektak 150 Profilometer

Tencor P15 Profilometer

Tencor P15 Profilometer(Left)

Tencor P15 Profilometer(Right)

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