Soft Lithography 

The Organic Cleanroom houses the Soft lithography Bay. This bay contains equipment specifically designed equipment for Soft Lithography fabrication. Soft lithography is a complementary extension of photolithography and is based on rapid prototyping using negative photoresist SU-8, and on replica molding of poly(dimethylsiloxane) (PDMS) onto the SU-8 film patterned by UV lithography. Due to its unique advantages such as low cost, compatible with large or non-planar surfaces, bio-compatible, etc., it has found its application in many area such as micro-and nanoscale patterning, nano functional devices (OLED, optical transducer, optical waveguide, etc.), and especially in biological researches.

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