Keywords: Georgia Tech, gatech, organic, cleanroom, analysis, materials, characterization, LEXT, confocal, microscope, laser scanning, 3D
The Georgia Tech Olympus LEXT, located in the Georgia Tech Biocleanroom, is a material laser confocal microscope with fixed laser wavelength of 405nm with magnification ranges: 108x – 17,280x. X-Y plane resolution:~120nm, height resolution:~20-30nm. Measurement modes: profile, area/volume, surface roughness, geometric, film thickness