IMS- Micro/Nano Fabrication Facility
Tystar Furnace Annealing/Sintering
Equipment
Tystar Furnace
Temperature (°C)
250 - 700
700 - 1350
Pressure (mT)
atm
Gas (sccm)
Forming Gas
3000 - 10000
N2
3000 - 10000
O2
3000 - 10000
Ar
3000 - 10000