IMS- Micro/Nano Fabrication Facility
Shipley Co. Photolithography

Shipley Co., Inc. Photolithography Chemicals

Chemical Name
Technical Data Sheet
Supplied by Cleanroom?
Microposit 319 Developer
Yes
Microposit 321 Developer
No
Microposit 351 Developer
Yes
Microposit 1112A Remover
Yes
Microposit S1800 Series Photo Resist
Microposit S1827
1813, 1827
Microposit S1400 Series Photo Resist
No
Megaposit SPR 220 Series Photoresist
SPR 220-7.0

**Note** that Microposit 354 Developer is 1 part 351 Developer to 3.5 parts deionized water.