IMS- Micro/Nano Fabrication Facility
Semi Insulating Polycrystalline Silicon
Temperature (°C)
 700 - 850
Pressure (mT)
 200 - 400
Gas 1 (sccm)
 N2O - 100
Gas 2 (sccm)
 SiH4: 10 - 25
Refractive Index
 1.45
Rate (Å/min)
 50 - 100

 

Georgia Institute of Technology
Shared User Management System
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