Oxide & Nitride Films -

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IMS- Micro/Nano Fabrication Facility

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Processing

Equipment Baseline

Process Support Team

Processing Fundamentals

Etching Process

Substrate Cleaning

Thermal Processing

Dielectrics Deposition (non-thermal)

Diamond-Like Carbon

Oxide & Nitride Films

Silicon Nitride

Silicon Oxynitride

RF Sputterer Dielectrics

Silicon Carbide

Metal Deposition Process

Processing Information

Oxide & Nitride Films

Silicon Oxide

Silicon Nitride

Silicon Oxynitride

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