IEN - Micro/Nano Fabrication Facility
Remote Processing Service

Service description:

Remote processing service is offered for IEN cleanroom users who are not available to come to cleanroom for their processing needs. IEN process support team handle the remote procerssing requests based on its capability and available resource. The service is based on "Best Effort" principle which means IEN cleanroom promises to do our best on achieving the goals requested by users, but can't guarantee the desired results. 

Procedure for requesting service:

  1. If you are not affiliated with Georgia Tech, set up a Special Service Agreement (SSA) with Georgia Tech first following the procedure.

  2. Submit a Statement of Work for your request.

  3. We will contact you to go over the details of the project.

  4. We will send you a Processing Plan and Cost Estimate for you to approve.

  5. Notice us 1 week before shipping the sample. We will arrange our processing schedule accordingly.

  6. Upon receipt of sample, we will inspect the sample, and confirm with you of the status of the sample.

  7. Once processing is finished, sample will be back to you with a Processing Summary which includes processing details and test results.

  8. Confirm with us on receiption of the processed sample, and help us filling the Satisfaction Survey.

  9. Bill will be sent to you by GTRC later.

Standard process information:

  1. PECVD SiO2/Si3N4/SiC deposition
  2. ALD dielectric/metal deposition
Contact Information
Institute for Electronics and Nanotechnology
Georgia Tech
345 Ferst Drive, Atlanta GA, 30332

For process support please click below