Login
Select Login Portal
IMS- Micro/Nano Fabrication Facility
Become a User
Services
Capabilities
Safety
Processing
Rates
Contact
SUMS Home
SearchÂ
Login
Select Login Portal
About IMS
Services
Consultation
Dicing
Equipment Access Control, Distributed Sensing & Custom Solutions
Equipment Checkout Request
Equipment Chemistry/Configuration Change Request
IMS Cleanroom Visitor Request
IMS IT & Computer Support
Laser Micromachining
Mask Fabrication
New Materials/Chemical/Gas Request Form
Process DevelopmentÂ
Process/Material Evaluation
Remote Processing Service
Service and Repair Request
sumBot ReadMe
Equipment Chemistry/Configuration Change Request
Contact Information
First Name
Last Name
Email
Phone
School/Department/Company
Equipment Chemistry/Configuration Change Request
What service are you requesting?
Unaxis PECVD: Helium <-> Hydrogen
Unaxis PECVD: PH3 bal. Helium <-> PH3 bal. Hydrogen
Tystar Poly: PH3 bal. Helium <-> PH3 bal. Hydrogen
What date do you plan to begin processing using the configuration change?
Response Required
What date do you plan to complete processes using the requested change?
Response Required
Please include any other relevant details below:
Submit
Contact Information
For process support please click below
Loading