Equipment Chemistry/Configuration Change Request

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Equipment Chemistry/Configuration Change Request

What service are you requesting?

Unaxis PECVD: Helium <-> Hydrogen

Unaxis PECVD: PH3 bal. Helium <-> PH3 bal. Hydrogen

Tystar Poly: PH3 bal. Helium <-> PH3 bal. Hydrogen

What date do you plan to begin processing using the configuration change?

Response Required

What date do you plan to complete processes using the requested change?

Response Required

Please include any other relevant details below:

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