Titanium Nitride Deposition -

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IMS- Micro/Nano Fabrication Facility

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Processing

Equipment Baseline

Process Support Team

Processing Fundamentals

Etching Process

Substrate Cleaning

Thermal Processing

Dielectrics Deposition (non-thermal)

Metal Deposition Process

Thin Film Evaporation Reference

Titanium Deposition

Titanium Nitride Deposition

Processing Information

Titanium Nitride Deposition

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