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IEN - Micro/Nano Fabrication Facility
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Research Capabilities
1. Photolithography
2. Etching
2.1 HF Vapor Etching
2.2 ICP Equipment
Oxford ICP-PECVD
Plasma Therm ICP
Plasma Therm ICP (Single Chamber)
STS AOE ICP
STS AOE ICP Pro
STS HRM ICP
STS ICP
STS Pegasus ICP
STS SOE ICP
2.3 Plasma Cleaning
2.4 RIE Equipment
2.5 DRIE/ICP Etching Capabilities
3. Thin Films
4. Micro-machining Laser Lab
5. High Temperature Solutions
6. Materials Growth
7. Metrology
8. IEN - Biocleanroom
9. Packaging
E-beam Lithography
Research Equipment
STS AOE ICP
Related Links
Equipment Page
Related Media
Operating Instructions
Contact Information
Tran-Vinh Nguyen
Process Equipment Engineer III
Institute for Electronics and Nanotechnology (IEN)
Georgia Institute of Technology
tran-vinh.nguyen@ien.gatech.edu
404-385-6678(Office)
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