Lecture Sessions

Photolithography

Chemical Vapor Deposition

Physical Vapor Deposition

Wet Etching & Dry Etching

Oxidation & Diffusion

Packaging Fundamental

Characterization & Testing

Contact Information

Hang Chen, Ph. D
Research Scientist II
IEN Process Support Manager

Institute for Electronics and Nanotechnology (IEN)
Georgia Institute of Technology
hang.chen@ien.gatech.edu
404-894-3360 (Office)