IMS- Micro/Nano Fabrication Facility
Mask Fabrication
Contact Information
First Name
Last Name
Email
Phone
School/Department/Company
Mask Service Request Form
Contact Information:
Name
University/Company
Are you an internal Georgia Tech researcher?
Yes
No
For GT: Please list Department and PI
Phone
Cell
Zip Code
Email
Address
City
State
Data Information:
File Name
File Type (Check all submitted)
.CIF
.DXF
.GDS
.BMP
List all Data Units (i.e. μm, mm)
Mask/ Layer Information:
Mask Title
Material
Chrome
Iron Oxide
Size
4 inch
5 inch
Other
Polarity
Clearfield
Darkfield
Parity
Up
Down
Critical Dimension (in μm)
CD Tolerance (in μm)
Total Pattern Dimensions (μm)
X: Y:
Total Pattern Dimensions
Quantity
Layer Callout Layer Pattern Dimension X: (μm) Layer Pattern Dimension Y: (μm) Smallest Feature Size (μm) Smallest Spacing Size (μm)
1
2
3
Largest Feature Size (μm)
1.
2.
3.
Special Instructions:
Upload Files
Contact Information
For process support please click below
Georgia Institute of Technology
Shared User Management System
791 Atlantic Drive
Atlanta GA 30332-0269 
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