The Micro & Nano World Really can be Flat... with CMP
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Speaker: Dr. Robert Rhoades, CTO,
Entrepix Inc.
The Institute for Electronics and Nanotechnology Lunch n’ Learn
Monday, November 7, 2016 from 12:00pm - 1:00pm
Marcus Nanotechnology Building 1117

Biography: Robert Rhoades is the Chief Technology Offcer for Entrepix, Inc. He earned a Ph.D. in Electrical Engineering from the University of Illinois in 1992. His background includes 2 years at Oak Ridge National Laboratory researching high density plasma processes for copper and boron oxide thin flms, followed by 3 years at Motorola as a senior process engineer bringing oxide, tungsten, and STI CMP into manufacturing. In 1997, he joined a small slurry company, Solution Technology, Inc, which was later acquired by Rodel, Inc (now part of Dupont). During fve years at Rodel, he led their efforts in global applications support and CMP integration. In 2002, Dr. Rhoades joined Entrepix which provides process and equipment services for customers using CMP for everything from R&D prototypes through volume production on virtually any material. Dr. Rhoades is a named inventor on more than 10 patents or patent applications and has authored over 95 technical publications and conference presentations.