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JEOL JBX-9300FS EBL System
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Which equipment would you like to see a new process or material added to?
Select Tool
1% Diborane in H2
2-Propanol
319 Developer
Abrasive Blast Cabinet
Abrasive Blast Cabinet - DUMMY TOOL
Acetic Acid, Glacial
Acetone
Acetylene
ADT 7100 Dicing Saw
AGREE Thermal Cycling Chamber
AirProTek SD 202 RApHN2
Aixtron Black Magic PECVD
AJA Chalcogenide Sputtering System
AJA Nitride Sputterer
Alabama UV Laser
Aluminum Etch, Type A
Aluminum Weighing Dish (42 mL)
Aluminum Weighing Dish (65mL)
Amber Jars (2oz)
Ammonia Compressed
Ammonium Hydroxide 29%
AMMT Hydrofluoric (HF) Vapor Etcher
AMSCOPE IN300TB Inverted Microscope
Argon Compressed
ATMI 863 CDO Abatement
ATMI CDO 863 - Subfab
Bay 4 Lab Door
Bay 5 Lab Door
Bay 6 Lab Door
BGA Rework Station
Biacore T200 SPR
Bioforce Nano eNabler Printer/Patterner
Blue M Nitrogen Oven Pettit 56 B
BMF microArch S140 3D Microfabrication System
Boron Trichloride
Boron Trichloride in Helium
Bottle Washer
Bouffants
Bowoptic Stress Measurement
BrightSpot Automation CellSpot - EL/PL
Bruker EDAX EDS
Bruker Tribolab CMP Left
Bruker Tribolab CMP Right
Buehler AutoMet 250 Automatic Polisher (grinder)
Buehler Ecomet 6 Polisher
Buffered Etch Oxide 6:1
Buffered Oxide Etch
Calcium Gluconate Gel
Cambridge Nanotech - Tester
Cambridge NanoTech Plasma ALD - Left
Cambridge NanoTech Plasma ALD - Right
Carbon Dioxide Compressed Cylinder
Cascade Probe Station and LCR Meter
Centrifuge
CET J2
CHA E-beam Evaporator 1 (dielectrics)
CHA E-beam Evaporator 2 (metals)
Chemcut Copper Etching System - Differential
Chemical Equipment Technology J2
Chemical-resistant Apron
Chemical-resistant Gloves (Size 10)
Chemical-resistant Gloves (Size 11)
Chemical-resistant Gloves (Size 6)
Chemical-resistant Gloves (Size 7)
Chemical-resistant Gloves (Size 8)
Chemical-resistant Gloves (Size 9)
Chlorine
Chromium Etch
Cleanroom Notebooks
Cleanroom Paper
CMOS Boat Checkout
CMOS Cleaning Station (Marcus)
CMOS Cleaning Station (Pettit)
CMOS Semitool Spin Rinse Dryer (SRD)
CMOS Spin Rinse Dryer (Inorganic)
Contact Angle Measurement System
Convection Oven DX400
Convection Oven_Bay 5
Copper Etching System
Copper Tape
Corning Matribot Bioprinter
Critical Point Dryer (Marcus)
Critical Point Dryer (Pettit)
Critical Point Dryer for Biological Samples.
C-SAM Scanning Acoustical Microscope D9000
CtrLayer AET RTP
CtrLayer Anti-Reflective Filament Evaporator
CtrLayer SDS - Sputterer System
CtrLayer SEF Sulfurization Furnace
CVC DC Sputterer
CVC E-Beam Evaporator 1
CVC E-Beam Evaporator 2 -- Instructional Center
CVD FirstNano Furnace in Pettit Cleanroom
CVD FirstNano Graphene Furnace 1
CVD FirstNano Graphene Furnace 2
CVD FirstNano SiGe Nanowire Furnace
DAD Disco Dicing Saw 3361
Dage X-Ray XD7600NT
Data Prep Computer Elionix
Data Prep Computer Nanoscribe
Dektak 150 Profilometer
Dektak 150 Profilometer -- Instructional Center
Delatech 857
Delatech SD 202 K
Denton Discovery - RF/DC Sputterer
Denton Discovery 2 - RF/DC Sputterer
Denton Explorer - E-beam Evaporator
Denton Infinity - E-beam/Filament Evaporator
Desktop Solder Reflow Oven
Desmear Line
Dichlorosilane
Die Ejector System
Differential Scanning Calorimeter (DSC) Q200
EcoSys Vector Ultra SI
EKRA Screen Printer- ASYS X5 STS
Electroless Plating Line
Electrolytic Plating Line-Tank 10
Electrolytic Plating Line-Tank 7
Elionix ELS-G100 EBL System
Espec Air Thermal Shock Chamber
Espec Hast System
Espec HAST System EHS-222M
Espec Liquid Thermal Shock Chamber TSB-22
Espec Thermal Cycler
Espec Thermal Shock Chamber TSA-43EL
Ethylene Compressed
EVG 620 Mask Aligner
EVG520 Wafer Bonder
EVG520 Wafer Bonder - Anodic Bonder Configuration
Exaddon Ceres Metal 3D printer
Face Masks
Face Shields
Finetech Sub-micron Flip-chip Bonder
FLUKE 985 Particle Counter
Fluorine/Krypton/Neon Blend
Fume Hood - Cleanroom A (Spin Coater)
Fume Hood - Cleanroom B
Fume Hood - Cleanroom C
Fume Hood - Materials Lab 383
Fume Hood - Plating Lab Left
Fume Hood - Plating Lab Right
Fumehood 1 Left
Fumehood 1 Right
Fumehood 2 Left
Fumehood 2 Right
Fumehood 3 Left
Fumehood 3 Right
Georgia Tech Biocleanroom
Germane
Glass Slides (25mm)
Glove Liners
Gloves (L)
Gloves (M)
Gloves (S)
Gloves (XL)
Gloves (XS)
Gravity Convection Oven - Envrio Testing Area
Heidelberg MLA 300
Heidelberg MLA150 1
Heidelberg MLA150 2
Helium 89%/Phosphine 1%/Silane 10%
Helium Compressed
Heraeus Vacuum Oven 1 (Top)
Heraeus Vacuum Oven 2 (Bottom)
High Speed Optical Signal Testing
Hinged Plastic Boxes (1x1)
Hinged Plastic Boxes (2x2)
Hinged Plastic Boxes (4x4)
Hitachi S-3500H SEM
Hitachi S-3700N VP-SEM
Hitachi S-4700 FE-SEM
Hitachi ZoneSEM Ozone Cleaner
Hummer 5 Gold/Palladium Sputterer
Hummer XP Gold Sputterer
Hydrochloric Acid
Hydrochloric Acid
Hydrofluoric Acid
Hydrofluoric Acid 49%
Hydrogen Bromide
Hydrogen Bromide
Hydrogen Bromide
Hydrogen Compressed
Hydrogen Compressed
Hydrogen Peroxide
Hydrogen Peroxide
Hydrogen/Nitrogen Gas Blend
Hydrogen/Nitrogen Gas Blend
IEN Mandatory Safety Seminar
Instructional Center CMOS Wet Bench
Instructional Center Fume Hood Left
Instructional Center Fume Hood Right
Isopropanol
Kapton Tape (1/2")
Kapton Tape (1/4")
Karl Suss MA6 BSA Chuck Checkout
Karl Suss MA6 Mask Aligner
Karl Suss MA6/BA6 -- Instructional Center
Karl Suss Manual Probe System
Karl Suss RC8 Spinner (Marcus)
Karl Suss RC8 Spinner (Pettit)
Karl Suss TSA MA-6 Mask Aligner
Keyence VK-X3000 3D Surface Profiler
KLA Tencor Surfscan 6100
Kurt J Lesker PVD 200
Kurt J. Lesker ALD 150LX
Lab Markers
Labconco labware washer.
Laminar Flow Hood
LapMaster 1 (Marcus Subfab)
LapMaster 2 (Marcus Subfab)
LapMaster 2 (Marcus Subfab)
Lasair 2 Particle Counter
Laser 1
Laser Drilling System
Laurell Spinner
LEO 1530 FE-SEM
Lesker E-beam Evaporator - Soft-Lithography
Lindberg Furnace 1 (CMOS Sintering Tube)
Lindberg Furnace 2 (Polymer Curing Tube)
Lindberg Furnace 3 (Oxidation Tube)
Lindberg Furnace 4 (Polymer Curing Tube)
Lindberg/Blue M Nitrogen Vacuum Oven
Liquid Thermal Shock Chamber - Left
Liquid Thermal Shock Chamber - Right
Logitech LP50 Lapper
Logitech PM5 Polisher 1
Logitech PM5 Polisher 2
Logitech SS Bonder
LPKF Desktop Solder Reflow Oven
Lunaire Environmental Test Chamber
MakerBot Replicator 3D Printer
Manual Flip Chip Bonder
Manual Screen Printer
Marcus ICR Gowning Room Printer
Marcus Inorganic Cleanroom
Marcus Organic Gowning Room Printer
Marcus Software Lab Door
Megaposit SPR 220-7.0
Meiki Vacuum Laminator
MEMS Boat Checkout
MEMS Spin Rinse Dryer (SRD)
MEMS Wet Bench
MEMS Wet Bench - KOH Bath
Methane Compressed
Methane Compressed
Methane Gas Cylinder
Methanol
Methanol
Micro System Analyzer Polytec MSA-500
MicroFab JetLab II Ink-jet Printer
Microfuge 18 Micro-centrifuge
Micromanipulator Probe Station - Pettit230
Micromolding Hotplate
Microposit 1165 Remover
Microposit MF319 Developer
Microposit MF351 Developer
Microposit S1813 G2
Microposit S1827 G2
Microposit SC 1813 Photoresist
Microposit SC1827 Photoresist
Microposit SPR 220-7 0 Photoresist
MicroPrime MP-P20, HMDS-P20
Microscope 1 -- Instructional Center
Microscope 2 -- Instructional Center
Microscope 4 - IR (infrared)
Microscope M1 (Olympus MX61)
Microscope M2 (Olympus MX61)
Microscope M4
Microscope M5 (Nikon L200)
Microscope P1
Microscope P2
Microscope P3
Microscope P4
Microscope P5
Microtech Laserwriter LW405
Monthly Cleanroom Entry Fee
MRL Furnace - Tube 2
MRL Furnace - Tube 3
MT Property Tester
Nanoscribe 3D Lithography
Nanospec Reflectometer - Inorganic
Nanospec Reflectometer - Pettit
Nitric Acid
Nitrogen Compressed
Nitrogen Compressed
Nitrogen Oven1_Pettit Cleanroom_Bay6
Nitrogen Oven--Clean Room
Nitrous Oxide
Nova FIB Micromanipulator
NR71-3000P Photoresist
NR9 1500PY Photoresist
Obducat Nano-imprinter (NIL)
Ocean Optics Spectrometer
Octafluorocyclobutane
Olympus LEXT 3D Material Confocal Microscope
Olympus MX50 Microscope
Olympus MX61 Microscope
Online Processing Help
OPTEC Femtosecond Laser Micro-machining System
Optical Profiler
Optomec Aerosol Jet 200
Organic CR Biosafety Cabinet 1
Organic CR Biosafety Cabinet 2
Organic CR Biosafety Cabinet 3
Organic CR Biosafety Cabinet 4
Organic CR Fumehood
Organic CR Laminar Flowhood 1
Organic CR Laminar Flowhood 2
Oxford End-point RIE
Oxford FlexAL ALD System
Oxford ICP-PECVD
Oxygen Compressed
Paper Towels
Peel Tester
Peel Tester
Pettit Cleanroom
Pettit Gowning Room Printer
Pettit Laminar Flow Fume Hood 1
Pettit Laminar Flow Fume Hood 2
Pettit Laminar Flow Fume Hood 3
Pettit Laminar Flow Fume Hood 4
pH Test Strips
PHI Hot Press
Phosphine/Argon
Phosphine/Helium
Phosphine/Helium
Photo Resist Developer
Photomask plate
Plasma Chamber_PE200
Plasma Cleaner
Plasma Therm 790 RIE.
Plasma Therm ICP
Plasma Therm ICP (Single Chamber)
Plasma Therm RIE
Plasma Therm SLR RIE
Plasma-Etcher Plasma Cleaner
Plating Bath Analyser
Plating Station 1
Plating Station 2
Plating Station 3
Plating Station 4
Potassium Hydroxide 45%
Precision Sectioning Saw
Probe Station Bonder Room
Projection Lithography System
Propane
PVD Filament Evaporator (Instructional Lab)
PVD75 Filament Evaporator
PVD75 RF Sputterer 1
Q600 TGA/DSC
Q-sense QCM-D
Quick Circuit 7000 PCB Milling Machine
Quick Circuit J5 -PCB Milling machine
RD6 Developer
RD6 Developer
Roll Jar Mill
Roll Laminator
RR-41 Resist Remover
Safety Glasses
Samco UV Ozone Dry Stripper
Schmid APCVD
Scoring Tool
SCS G3P8 Spin Coater -- Instructional Center
SCS G3P8 Spin Coater 1 - Inorganic
SCS G3P8 Spin Coater 2 - Pettit
SCS G3P8 Spin Coater 3 - Inorganic
SCS G3P8 Spin Coater 4 - Inorganic
SCS G3P8 Spin Coater 6 - Inorganic
SCS Parylene Coater
Sealable Plastic Bags
Semi-Automatic Flip Chip Bonder
Semi-automatic Screen Printer - MPM
SemiTest SCA-2500 Surface Charge Analyzer
Semitool Spin Rinse Dryer -- Instructional Center
Semprex Spectrometer -- Instructional Center
Shadow Moire System
Shoe Covers
Signatone Four-point Probe
Signatone Probe Station
Silane Compressed
Silane/Helium
Silane/Nitrogen
Siphon Pail Pump
SMI Video Microscope With Measurement Stage
Soft Lithography Door
Solder Mask Developer
Solder Reflow Oven
Solvent Fumehood Left
Solvent Fumehood Right
Special Project Space
Spin Coater Laurell
SSI RTP
SSI RTP 2
STS HRM ICP
STS ICP
STS PECVD 3
STS Pegasus ICP
STS SOE ICP
Stylus Profiler-KLA Tencor P-6
SU-8 Developer
Sulfur Hexafluoride
Sulfuric Acid
Sulfuric Acid, 96%
Surrey CNT NanoGrowth
Suss AltaSpray Spray Coater
SUSS MicroTec MA8/BA8 Mask Aligner
Swabs (Medium)
Swabs (Small)
SWC 3000-C Mask Cleaner
Synbiosis ProtoCOL SR Colony Counter
Syringe Filters (25 mm, 0.22 μm)
Syringe Needles (16G)
Syringe Needles (18G)
Syringes (5mL)
Tacky Mats (26" x 45", Blue)
Tacky Roller
Tamarack Mask Aligner and Exposure System
Technical Seminar
Technics Micro PD -- Instructional Center
Temperature/Humidity Chamber East
Temperature/Humidity Chamber West
Tencor KLA Profilometer
Tencor KLA Profilometer - FC
test_tool_01
test1
Tetrafluoromethane
Tetrafluoromethane-Oxygen Mixture
Texwipes
Thermo Scientific Axia ChemiSEM
Thermo Scientific iS50 FT-IR Spectrometer
Thermo Scientific Precision Oven
Thermo UV-VIS Spectrometer
Thermotron Air Thermal Shock Chamber
TPT HB16 Ball Bonder
TPT HB16 Leica S9D
TPT HB16 Wirebonder Leica S9E
Transfer Pipettes (7.7mL)
Trashbags
Trichloroethylene
Trifluoromethane
Trimethylboron/Argon
Tube Furnace
Tystar Mini TEOS Tube 3
Tystar Mini Tube 1
Tystar Mini Tube 2
Tystar Nitride Furnace 1
Tystar Nitride Furnace 2
Tystar Nitride Furnace 4
Tystar Nitride Wet Dry Oxidation Furnace 3
Tystar Poly Furnace 1
Tystar Poly Furnace 2
Tystar Poly Furnace 3
Tystar Poly Furnace 4
UHV Aluminum Foil (12")
UHV Aluminum Foil (18")
Ultimaker S3 3D Printer
Unaxis PECVD
Unaxis RIE
Unifilm Chamber Vent
Unifilm Sputterer
Unifilm Storage Box Left
Unifilm Storage Box Right
UV Curing Machine
UV LED Curing Oven
Vector 5000-1
Vector 5000-2
Veeco Fiji G2 ALD 1
Veeco Fiji G2 ALD 2
Veeco Four-point Probe -- Instructional Center
Verteq Spin Rinse Dryer -- Instructional Center
Vision RIE 1
Vision RIE 2
VWR Gravity Convection Oven
VWR Oven
VWR Oven
Wafab N2 Dryer hood.
Wafer Inspection Camera
Woollam Alpha-SE Ellipsometer
Woollam M2000 Ellipsometer
Woollam Vase Ellipsometer
Wyko NT2000
Wyko NT2000 Profilometer (VEECO)
Wyko Profilometer NT3300
Xactix Xenon Difluoride Etcher
Xyztec Condor Sigma Bond Tester
Zetasizer Nano ZS
Is this new process available anywhere else in the IEN?
Give a brief description of what you would like to add.
Give a brief description of the new process.
Will this new process require any new chemicals or materials?
Will you be covering the cost of the new material or bringing it on your own?
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