IEN - Micro/Nano Fabrication Facility
Cleanup Procedures

About Pettit Cleanroom

Vacuums are located in the chase between the class 10 and the class 1000 photolithography bays.

Users must swipe in and swipe out of the cleanroom using their cleanup card or they will not receive credit for performing their cleanup duties.

Cleanup Tasks

Wipe down EBL facility

Using DIY water and texwipes, wipe down the table and spincoat hood. Throw out any loose trash in the area. If you have any questions about this task, contact Devin Brown (devin.brown@mirc.gatech.edu).

Clean up mask shop

Retrieve a vacuum and vacuum the floor in the mask shop and the area adjacent to the mask shop. Clean and dry any glassware sitting out and then place it underneath on the right side. Throw out any trash. Remove any extra or empty solvent bottles and refill them.

Clean inside windows

Using some window cleaner and texwipes, wipe down the windows inside the cleanroom.

Clean outside windows

Using some window cleaner and texwipes, wipe down the windows surrounding the cleanroom. It is not necessary to enter the cleanroom for this task.

Wipe down 3 left bays

Using DIY water and texwipes, wipe down the equipment in the three left bays. Using some window cleaner, clean any computer monitor screens in the 3 left bays.

Vacuum ebl facility

Retrieve a vacuum and then vacuum all the floors in the EBL facility. This includes the workstation room, the spin coat room, and the column room.

Wipe down 3 right bays

Using some DIY water and texwipes, wipe down the equipment in the 3 right bays. Using some DIY water, clean any computer monitor screens in the 3 right bays.

Vacuum focus center

Retrieve a vacuum and then vacuum the floor in the focus center.

Vacuum left 3 bays

Retrieve a vacuum and then vacuum the floor on the 3 left bays inside the cleanroom.

Vacuum right 3 bays

Retrieve a vacuum and then vacuum the floor on the 3 right bays inside the cleanroom.

Vacuum storage/gowning area

Retrieve a vacuum and then vacuum the floor in the gowning area and the storage area.

Fill up solvent bottles

Collect all methanol, isopropanol, trichloroethylene (TCE), and acetone squirt bottles. Then go to the cleanroom storage area and fill them up using the big jugs located on the sink.

Take out trash

Go around the cleanroom and take out all the trash bags. You also need to remove the sharps bag located in the main hallway. Place the bags outside the cleanroom by taking them through the storage area. Once all the bags have been removed from the cleanroom, you will need to take them to the dumpster outside using a cart provided by the cleanroom staff. To get to the dumpster, take the elevator to the basement and proceed down the hallway. Once you pass through some double doors, exit out the first door on your left. If you continue walking straight, you will see a brown dumpster on your left.

Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu