IEN - Micro/Nano Fabrication Facility
Silane Safety Information

Discriptions of the powerpoints available under thre related media:

Silane Manufacturing Overview - Brian Schell, Dow Corning

Silane Manufacturing Overview will include a survey of the various technologies commercially employed to produce silane, physical properties of silane, common package types/sizes, and the practical implementation of leak detection and mitigation systems in use at Dow Corning. 

Silane Systems and Operation - Kelvin Huang, Air Product

Proper design and operation of a silane use system is key to safety and quality. This presentation will review industry standards, best practices, and system safeguards that are important to consider for a silane system. Operator training and PPE (Personal Protective Equipment) are other important considerations, and they will be outlined during this presentation.

Hazards and Ignition Behavior of Silane Releases - Prof Jeng-Renn Chen, Kaohsiung First University

A silane release from a pressure source may not always lead to prompt ignition and frequently the ignition occurs when the release is shut-off. In a confined space, significant quantities of silane can accumulate prior to autoignition leading to an explosion, causing significant damage. To date, the mechanism and condition of pure silane ignition upon release into air has not been completely explained. This lecture presents a series of tests that uncovered the precise condition for pure silane ignition upon release into air, in addition to tests with a release from a cylinder valve, flame impingement on the cylinder, explosion of a cylinder cabinet, and detection of silane flame. The implications of the test results are discussed, with emphasis on the safety of silane supply systems and operation practices.

Revision of CGA G-13 and Release Testing - Gary Miller, Air Products

The Compressed Gas Association (CGA), standard G-13 is the recognized world standard for silane and silane mixtures. The first edition was approved in 2000. The second edition which is also an ANSI (American National Standards Institute) approved standard was adopted in 2006. Due to changes in use and packaging G-13 is undergoing the revision process. This presentation will discuss the ramifications of the CGA G-13 revision.

Lessons Learned from Silane Use - Eugene Ngai, Chemically Speaking LLC

In over 40 years the use of silane has grown dramatically. During this time there have been many lessons learned that have helped to improve safety and quality in use. While Silane is a pyrophoric gas with an extremely wide flammable range, releases into the air may not always ignite immediately or sometimes not at all. This presentation will discuss some operating incidents and key safety learnings, including silane leak behavior, leaks due to expansion cooling, and PPE.

Silane Emergency Response, Asia - Tommy Ju, Air Products

If an incident involving silane occurs, timely response with a trained team and equipment is critical. This presentation will summarize Air Products Electronic Specialty Gas (ESG) Emergency Response program in China. This has been an ongoing effort since 2000. It will also review an actual silane ISO module ER transfill performed in Korea by the AP Korea ER team due to a leak.

The original information on the presentations can be found on the Dow Corning website

Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 |