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Equipment Hardware Modification Form Draft
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JEOL JBX-9300FS EBL System
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Equipment Hardware Modification Form Draft
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Equipment Hardware Modification Request Form
Which of the following tools would you like to see a modification on?
Select Tool
Laurell WS-650Mz-8NPPB Spin Coater
Sonoscan C-SAM D9000 Scanning Acoustic Microscope
1% Diborane in H2
2-Propanol
319 Developer
Abrasive Blast Cabinet
Abrasive Blast Cabinet - DUMMY TOOL
Acetic Acid, Glacial
Acetone
Acetylene
ADT 7100 Dicing Saw
AirProTek SD 202 RApHN2
Aixtron Black Magic PECVD
AJA Chalcogenide Sputterer
AJA Nitride Sputterer
Akrometrix TherMoire PS200S Shadow Moire System
Alabama UV Laser
Aluminum Etch, Type A
Aluminum Weighing Dish (42 mL)
Aluminum Weighing Dish (65mL)
Amber Jars (2oz)
Ammonia Compressed
Ammonium Hydroxide 29%
AMMT Hydrofluoric (HF) Vapor Etcher
AMSCOPE IN300TB Inverted Microscope
Argon Compressed
ASYS EKRA X5 STS Screen Printer
ATMI 863 CDO Abatement
ATMI CDO 863 - Subfab
Bay 4 Lab Door
Bay 5 Lab Door
Bay 6 Lab Door
BGA Rework Station
Biacore T200 SPR
Bioforce Nano eNabler Printer/Patterner
Blue M Nitrogen Oven Pettit 56 B
BMF microArch S140 3D Microfabrication System
Boron Trichloride
Boron Trichloride in Helium
Bottle Washer
Bottle Washer (Pettit)
Bouffants
Bowoptic Stress Measurement
BrightSpot Automation CellSpot - EL/PL
Bruker EDAX EDS
Bruker Tribolab CMP Left
Bruker Tribolab CMP Right
BTU PYRAMAX 100N 8 Zone Solder Reflow Oven
Buehler AutoMet 250 Automatic Polisher (grinder)
Buehler Ecomet 6 Polisher (grinder)
Buffered Etch Oxide 6:1
Buffered Oxide Etch
Calcium Gluconate Gel
Cambridge Nanotech - Tester
Cambridge NanoTech Plasma ALD - Left
Cambridge NanoTech Plasma ALD - Right
Carbon Dioxide Compressed Cylinder
Cascade Probe Station and LCR Meter
Centrifuge
CET J2
CHA E-beam Evaporator 1 (dielectrics)
CHA E-beam Evaporator 2 (metals)
Chemcut 2315D Spray Developer System​
Chemcut 2315E Differential Copper Etch System
Chemcut Plating Line
Chemical Equipment Technology J2
Chemical-resistant Apron
Chemical-resistant Gloves (Size 10)
Chemical-resistant Gloves (Size 11)
Chemical-resistant Gloves (Size 6)
Chemical-resistant Gloves (Size 7)
Chemical-resistant Gloves (Size 8)
Chemical-resistant Gloves (Size 9)
Chlorine
Chromium Etch
ClassOne Solstice S8 Automated Electroplating Syst
Cleaning (Acid dip tanks, Tank 16-21)
Cleanroom Entry Fee - Industry Rate
Cleanroom Notebooks
Cleanroom Paper
CMOS Boat Checkout
CMOS Cleaning Station (Marcus)
CMOS Nitric Station (Pettit)
CMOS Piranha Station (Pettit)
CMOS SC1 Station (Pettit)
CMOS SC2 Station (Pettit)
CMOS Semitool Spin Rinse Dryer (SRD)
CMOS Spin Rinse Dryer (Inorganic)
Contact Angle Measurement System
Convection Oven DX400
Copper Etching System
Copper Tape
Corning Matribot Bioprinter
Critical Point Dryer (Marcus)
Critical Point Dryer (Pettit)
Critical Point Dryer for Biological Samples.
CtrLayer AET RTP
CtrLayer Anti-Reflective Filament Evaporator
CtrLayer SDS - Sputterer System
CtrLayer SEF Sulfurization Furnace
Cure UV HTBX II UV LED Curing Oven
CVC DC Sputterer
CVC E-Beam Evaporator 1
CVC E-Beam Evaporator 2 -- Instructional Center
CVC Ebeam Evaporator- Environmental Science Lab.
CVD FirstNano Furnace in Pettit Cleanroom
CVD FirstNano Graphene Furnace 1
CVD FirstNano Graphene Furnace 2
CVD Firstnano PowderCoat 300 System
CVD FirstNano SiGe Nanowire Furnace
Dage XD7600NT X-Ray
Data Prep Computer Elionix
Data Prep Computer Nanoscribe
Dektak 150 Profilometer
Delatech 857
Delatech SD 202 K
Denton Discovery - RF/DC Sputterer
Denton Discovery 2 - RF/DC Sputterer
Denton Explorer - E-beam Evaporator
Denton Infinity - E-beam/Filament Evaporator
Desktop Solder Reflow Oven
Desmear (Sweller, Perm-Etch, Neutralizer,Tank 1-6)
Dichlorosilane
Die Ejector System
Differential Scanning Calorimeter (DSC) Q200
Disco DAD3361 Dicing Saw
DISCO DAG810 Grinder
Dummy_test6
dummy_test7
EcoSys Vector Ultra SI
Eless(Microetch to Electroless,Tank 7-15)
Elionix ELS-G100 EBL System
ESI CornerStone ICP Series 1 Laser Drilling System
Espec BTZ4200 Thermal Cycling Chamber
Espec EHS 222M HAST System
Espec TSA-43EL Thermal Shock Chamber
Espec TSB-22 Liquid to Liquid Thermal Shock
Ethylene Compressed
EVG 620 Mask Aligner
EVG520 Wafer Bonder
Exaddon Ceres Metal 3D printer
Face Masks
Face Shields
Finetech Fineplacer Lambda Flip-chip Bonder
Finetech Fineplacer Matrix Flip Chip Bonder
Finetech Fineplacer Sigma Flip Chip Bonder
FLUKE 985 Particle Counter
Fluorine/Krypton/Neon Blend
Fume Hood - Cleanroom A (Spin Coater)
Fume Hood - Cleanroom B
Fume Hood - Materials Lab 383
Fume Hood - Plating Lab Left
Fume Hood - Plating Lab Right
Fumehood 1 Left
Fumehood 1 Right
Fumehood 2 Left
Fumehood 2 Right
Fumehood 3 Left
Fumehood 3 Right
Georgia Tech Biocleanroom
Germane
Glass Slides (25mm)
Glove Liners
Gloves (L)
Gloves (M)
Gloves (S)
Gloves (XL)
Gloves (XS)
Gravity Convection Oven - Envrio Testing Area
Heidelberg MLA 300
Heidelberg MLA150 1
Heidelberg MLA150 2
Helium 89%/Phosphine 1%/Silane 10%
Helium Compressed
Heraeus Vacuum Oven 1 (Top)
Heraeus Vacuum Oven 2 (Bottom)
High Speed Optical Signal Testing
Hinged Plastic Boxes (1x1)
Hinged Plastic Boxes (2x2)
Hinged Plastic Boxes (4x4)
Hitachi S-3700N VP-SEM
Hitachi S-4700 FE-SEM
Hitachi ZoneSEM Ozone Cleaner
Hummer 5 Gold/Palladium Sputterer
Hummer XP Gold Sputterer
Hydrochloric Acid
Hydrochloric Acid
Hydrofluoric Acid
Hydrofluoric Acid 49%
Hydrogen Bromide
Hydrogen Bromide
Hydrogen Bromide
Hydrogen Compressed
Hydrogen Compressed
Hydrogen Peroxide
Hydrogen Peroxide
Hydrogen/Nitrogen Gas Blend
Hydrogen/Nitrogen Gas Blend
IEN Mandatory Safety Seminar
Instructional Center CMOS Wet Bench
Instructional Center Fume Hood Left
Instructional Center Fume Hood Right
Isopropanol
Kapton Tape (1/2")
Kapton Tape (1/4")
Karl Suss MA6 BSA Chuck Checkout
Karl Suss MA6 Mask Aligner
Karl Suss MA6/BA6 -- Instructional Center
Karl Suss Manual Probe System
Karl Suss RC8 Spinner (Pettit)
Karl Suss TSA MA-6 Mask Aligner
Keyence VK-X3100 3D Surface Profiler
KLA Qualilab Elite V10 Manual Chemical Analyzer
KLA Qualilab Elite V20 Chemical analyzer
KLA SPTS Rapier ICP
KLA Tencor Surfscan 6100
KOH Bath/Silicon Etching Bath (RIGHT)
Kurt J Lesker PVD 200
Kurt J Lesker PVD 200 (2)
Kurt J. Lesker ALD 150LX
Lab Markers
Labconco labware washer.
Laminar Flow Hood
LapMaster 1 (Marcus Subfab)
LapMaster 2 (Marcus Subfab)
LapMaster 2 (Marcus Subfab)
Lasair 2 Particle Counter
Laurell Spinner
LEO 1530 FE-SEM
Lesker E-beam Evaporator - Soft-Lithography
Lindberg Furnace 1 (CMOS Sintering Tube)
Lindberg Furnace 2 (Polymer Curing Tube)
Lindberg Furnace 3 (Oxidation Tube)
Lindberg Furnace 4 (Polymer Curing Tube)
Lindberg/Blue M Nitrogen Vacuum Oven
Logitech LP50 Lapper
Logitech PM5 Polisher 1
Logitech PM5 Polisher 2
Logitech SS Bonder
LPKF Protoflow S N2 Desktop Reflow Oven
MakerBot Replicator 3D Printer
Manual Flip Chip Bonder
Marcus ICR Gowning Room Printer
Marcus Inorganic Cleanroom
Marcus Organic Gowning Room Printer
Marcus Software Lab Door
Megaposit SPR 220-7.0
Meiki MVLP300/300-s Vacuum Laminator
Methane Compressed
Methane Compressed
Methane Gas Cylinder
Methanol
Methanol
Micro System Analyzer Polytec MSA-500
MicroFab JetLab II Ink-jet Printer
Microfuge 18 Micro-centrifuge
Micromanipulator Probe Station - Pettit230
Micromolding Hotplate
Microposit 1165 Remover
Microposit MF319 Developer
Microposit MF351 Developer
Microposit S1813 G2
Microposit S1827 G2
Microposit SC 1813 Photoresist
Microposit SC1827 Photoresist
Microposit SPR 220-7 0 Photoresist
MicroPrime MP-P20, HMDS-P20
Microscope 1 -- Instructional Center
Microscope 2 -- Instructional Center
Microscope 4 - IR (infrared)
Microscope M1 (Olympus MX61)
Microscope M2 (Olympus MX61)
Microscope M4
Microscope M5 (Nikon L200)
Microscope P1
Microscope P2
Microscope P3
Microscope P4
Microscope P5
Microtech Laserwriter LW405
Millibox MBX-03 Anechoic Chamber
Monthly Cleanroom Entry Fee
MRL Furnace - Tube 2
MRL Furnace - Tube 3
MT Property Tester
Nanoscribe 3D Lithography
Nanospec Reflectometer - Inorganic
Nanospec Reflectometer - Pettit
Nitric Acid
Nitrogen Compressed
Nitrogen Compressed
Nitrogen Oven--Clean Room
Nitrous Oxide
Nova FIB Micromanipulator
NR71-3000P Photoresist
NR9 1500PY Photoresist
Obducat Nano-imprinter (NIL)
Ocean Optics Spectrometer
Octafluorocyclobutane
Olympus LEXT 3D Material Confocal Microscope
Olympus MX50 Microscope
Olympus MX61 Microscope
Online Processing Help
OPTEC#1 Femtosecond Laser Micro-machining System
OPTEC#2 Femtosecond Laser Micro-machining System
Optomec Aerosol Jet 200
Organic CR Biosafety Cabinet 1
Organic CR Biosafety Cabinet 2
Organic CR Biosafety Cabinet 3
Organic CR Biosafety Cabinet 4
Organic CR Fumehood
Organic CR Laminar Flowhood 1
Organic CR Laminar Flowhood 2
Osiris Spin Coater
Oxford End-point RIE
Oxford FlexAL ALD System
Oxford ICP-PECVD
Oxygen Compressed
Paper Towels
Pettit Cleanroom
Pettit Gowning Room Printer
Pettit Laminar Flow Fume Hood 1
Pettit Laminar Flow Fume Hood 2
Pettit Laminar Flow Fume Hood 3
Pettit Laminar Flow Fume Hood 4
pH Test Strips
PHI Hot Press
Phosphine/Argon
Phosphine/Helium
Phosphine/Helium
Photomask plate
Plasma Cleaner
Plasma Etch PE200 Plasma Chamber
Plasma Therm 790 RIE.
Plasma Therm HDPCVD
Plasma Therm ICP
Plasma Therm ICP (Single Chamber)
Plasma Therm RIE
Plasma Therm SLR RIE
Plasma Therm Versaline ICP (Dielectrics Etching)​​
Plasma Therm Versaline ICP (SiC Etching)
Plating Bath Analyser
Plating Station 1
Plating Station 2
Plating Station 3
Plating Station 4
Potassium Hydroxide 45%
Precision Sectioning Saw
Probe Station Bonder Room
Probe Station Marcus 4th floor
Projection Lithography System
Propane
PV Clean Bench
PVD Filament Evaporator (Instructional Lab)
PVD75 Filament Evaporator
PVD75 RF Sputterer 1
Q600 TGA/DSC
Q-sense QCM-D
Quick Circuit 7000 PCB Milling Machine
Quick Circuit J5 -PCB Milling machine
RD6 Developer
RD6 Developer
Rinse Tanks (24,25)
Roll Jar Mill
RR-41 Resist Remover
Safety Glasses
Samco UV Ozone Dry Stripper
Schmid APCVD
Scoring Tool
SCS G3P8 Spin Coater -- Instructional Center
SCS G3P8 Spin Coater 3 - Inorganic
SCS G3P8 Spin Coater 4 - Inorganic
SCS Parylene Coater
Sealable Plastic Bags
Seamark ZM-R730A Large Board BGA Rework Station
SemiTest SCA-2500 Surface Charge Analyzer
Semitool Spin Rinse Dryer -- Instructional Center
Semprex Spectrometer -- Instructional Center
Shoe Covers
Signatone Four-point Probe
Signatone Probe Station
Silane Compressed
Silane/Helium
Silane/Nitrogen
Silicon Wafer (4in Test Grade)
Siphon Pail Pump
SMI Video Microscope With Measurement Stage
Soft Lithography Door
Solvent Fumehood Left
Solvent Fumehood Right
Special Project Space
SSI RTP
SSI RTP 2
STS ICP
STS PECVD 3
STS Pegasus ICP
STS SOE ICP
Stylus Profiler-KLA Tencor P-6
SU-8 Developer
Sulfur Hexafluoride
Sulfuric Acid
Sulfuric Acid, 96%
Surrey CNT NanoGrowth
Suss AltaSpray Spray Coater 1
Suss AltaSpray Spray Coater 2
Suss Microtec ACS 200​
Suss Microtec LabSpin6 1
Suss Microtec Labspin6 2
Suss Microtec Labspin8
SUSS MicroTec MA8/BA8 Mask Aligner
Swabs (Medium)
Swabs (Small)
SWC 3000-C Mask Cleaner
Syringe Filters (25 mm, 0.22 μm)
Syringe Needles (16G)
Syringe Needles (18G)
Syringes (5mL)
Tacky Mats (26" x 45", Blue)
Tacky Roller
Tamarack Mask Aligner and Exposure System
Tamerica Versalam-1300 Roll Laminator
Tank 22_Through Hole Filling ( Tank 22-23)
Tank 26_Electrolytic Plating Station_SAP3
Tank 28_Electrolytic Cu_InPro VLF
Technical Seminar
Technics Micro PD -- Instructional Center
Temperature/Humidity Chamber East
Temperature/Humidity Chamber West
Tempress Furnace 1 (POCl3 Doping)
Tempress Furnace 2 (BBr3 Doping)
Tempress Furnace 3 (PECVD Nitride)
Tencor KLA Profilometer
Tencor KLA Profilometer - FC
Test Door
Test Tool
Testing Machine Inc 80-91 Peel Tester
Tetrafluoromethane
Tetrafluoromethane-Oxygen Mixture
Texwipes
Thermo Scientific Axia ChemiSEM
Thermo Scientific iS50 FT-IR Spectrometer
Thermo Scientific Precision Oven
Thermo UV-VIS Spectrometer
TPS LunaireCEO910-4 Lunaire Environmental Chamber
TPT HB100 Wirebonder
TPT HB16 Lecia S9D Wirebonder (Left)
TPT HB16 Lecia S9E Wedge Bonder (Right)
Transfer Pipettes (7.7mL)
Trashbags
Trichloroethylene
Trifluoromethane
Trimethylboron/Argon
Tube Furnace
Tystar Mini TEOS Tube 3
Tystar Mini Tube 1
Tystar Mini Tube 2
Tystar Nitride Furnace 1
Tystar Nitride Furnace 2
Tystar Nitride Furnace 4
Tystar Nitride Wet Dry Oxidation Furnace 3
Tystar Poly Furnace 1
Tystar Poly Furnace 2
Tystar Poly Furnace 3
Tystar Poly Furnace 4
UHV Aluminum Foil (12")
UHV Aluminum Foil (18")
Ultimaker S3 3D Printer
Unaxis PECVD
Unaxis RIE
Unifilm Chamber Vent
Unifilm Sputterer
Unifilm Storage Box Left
Unifilm Storage Box Right
UV Curing Machine
Vector 5000-1
Vector 5000-2
Veeco Fiji G2 ALD 1
Veeco Fiji G2 ALD 2
Veeco Four-point Probe -- Instructional Center
Verteq Spin Rinse Dryer -- Instructional Center
Vision RIE 1
Vision RIE 2
VWR Gravity Convection Oven
VWR Oven
VWR Oven
VWR_Convection Oven_Bay 6
Wafab N2 Dryer hood.
Wafer Inspection Camera
Woollam Alpha-SE Ellipsometer
Woollam M2000 Ellipsometer
Woollam Vase Ellipsometer
Wyko NT2000 Profilometer (VEECO)
Wyko Profilometer NT3300
Xactix Xenon Difluoride Etcher
X-Carve Pro 4 x 2 CNC System
Xyztec Condor Sigma Bond Tester​
Yamato DN411IE Nitrogen Oven Bay6
Zetasizer Nano ZS
Please provide a brief description of what you would like to modify.
Will your group provide any financial support for the modification if there is a cost to the change?
Have you already looked into the cost and lead time required for the change?
Please provide any quotes or documentation you have collected.
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