IEN - Micro/Nano Fabrication Facility
Heidelberg Instruments MLA 150
Heidelberg MLA 150
Related Links
Heidelberg MLA 150
Contact Information
Hang Chen, Ph.D.
Process Support Manager
The Institute for Electronics and Nanotechnology at Georgia Tech
345 Ferst Drive, Atlanta GA, 30332 | 1152
404.894.3360 | hang.chen@ien.gatech.edu