IEN - Micro/Nano Fabrication Facility
Custom Equipment

  

Revitilizing Aging Equipment:

As our equipment ages it becomes more unreliable. Down time increases. Results suffer. The most common strategy in the industry is to retire or sell the tool and purchase a new one. The IEN takes advantage of its talented group of multidisciplinary staff to revitalize or repurpose aging or unusable equipment. Doing so saves money and allows us to offer new capabilities to our users rapidly. It also gives us more options when attempting to source used equipment at a reduced price!


Designed "From Scratch":

Sometimes research demands new processes that don't even exist yet! CtrLayer equipment and software can be customized in house without the need of expensive vendor intervention. Many of our tools were designed and fabricated entirely "from scratch". We can in-house develop lower-cost equipment for processes such as sputtering or ALD, or offer unique new processes.


Senior Design Opportunities:

We actively try to pass on our knowledge and expertise to the next generation of engineers. Many of our projects have been senior design collaborations with students from electrical, computer and mechanical engineering.


Our CtrLayer Equipment Portfolio:

AET RTPALD 1ALD 2CtrLayer ARC
CtrLayer SDSCVC DC SputtererCVC Ebeam EvaporatorIC CVC Ebeam Evaporator
Denton Discovery 2Denton InfinityHeraeus Vacuum Oven (M)Heraeus Vacuum Oven (P)
JetFirst RTPLindberg Furnace 1Lindberg Furnace 2Lindberg Furnace 3
Lindberg Furnace 4IC PVD75 FEPVD75 FEPVD75 RF Sputterer
Sulfurization FurnaceUnifilm SputtererYES R1 Plasma Cleaner

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Contact Information
Thomas Johnson-Averette
Phone: 404 971 8594
Email: thomas.ja@ien.gatech.edu