IEN - Micro/Nano Fabrication Facility

The following links are to 4 different cameras in the EBL area.

EBL column: This is the room housing the main electron column, high voltage source, and chamber.

EBL cassette table: This table is also in the column room and it is where samples are carefully placed into cassettes on a teflon sheet.

EBL spincoat area: Here samples are prepared for resist spin coating and baking. This room is adjacent to the console room.

EBL console room: The main workstation is in this room. Job files are prepared and executed here.

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