IEN - Micro/Nano Fabrication Facility
Research Equipment

Backend Processing and Packaging

  • SCS Parylene Coater
  • ADT 7100 Dicing Saw
  • LapMaster (3)
  • Logitech LP50 Lapper
  • Logitech PM5 Polisher
  • AET RTP
  • SSI RTP
  • JetFirst RTP
  • Finetech Sub-Micron Flip-chip Bonder
  • Karl Suss SB6 Bonder
  • Karl Suss SB8E Bonder

Bio-Analysis

  • Contact Angle Measurement System
  • Biacore T200 SPR
  • Bioforce Nano eNabler Printer/Patterner
  • Malvern Zetasizer
  • MicroFab JetLab II Ink-jet Printer
  • Microfuge 18 Micro-centrifuge
  • Q-sense QCM-D

Etch

Chemical Etcher

  • Xactix Xenon Difluoride Etcher
  • AMMT Hydrofluoric (HF) Vapor Etcher

RIE

  • Advanced Vacuum Vision RIE (2)
  • Oxford End-point RIE
  • Plasma Therm RIE
  • Plasma Therm SLR RIE
  • Technics Micro RIE
  • Unaxis RIE

DRIE

  • Plasma Therm ICP (2)
  • STS AOE ICP
  • STS SOE ICP

DRIE-Bosch

  • STS HRM ICP
  • STS ICP
  • STS Pegasus ICP

Cleaner

  • Samco UV Ozone Dry Stripper
  • Plasma-Etcher Plasma Cleaner
  • YES-R1 Plasma Cleaner
  • Gasonics Asher (2)

Accessory

  • Tousimis Super Critical Dryer (2)

Furnaces and Diffusion

Oxidation

  • Tystar Nitride Furnace
  • Tystar Poly Furnace
  • Tystar Mini Tube (2)
  • Lindberg Furnace
  • MRL Furnace - Tube (2)

LPCVD

  • Tystar Mini Tube
  • Tystar Nitride Furnace
  • Tystar Poly Furnace (2)
  • CtrLayer SEF Sulfurization Furnace
  • CVD FirstNano Graphene Furnace (2)
  • CVD FirstNano SiGe Nanowire Furnace

Doping/Annealing

  • Tystar Nitride Furnace (2)
  • Tystar Poly Furnace

Sintering/Curing

  • Lindberg Furnace (3)

Lithography

Coater

  • BLE Spinner
  • EBL CEE Spinner
  • EVG 101 Spin Coater
  • Karl Suss RC8 Spinner (2)
  • Laurell Spinner
  • SCS G3P8 Spin Coater (6)
  • Suss AltaSpray Spray Coater

Mask Aligner

  • EVG 620 Mask Aligner
  • Karl Suss MA-6 Mask Aligner (3)
  • Karl Suss TSA MA-6 Mask Aligner
  • Suss Microtec MJB4

Pattern Generator

  • Microtech Laserwriter LW405
  • Heidelberg MLA 150 Mask Alinger

Other Lithography System

  • Obducat Nano-imprinter (NIL)
  • Nanoscribe 3D Lithography
  • JEOL JBX-9300FS EBL System
  • Elionix EBL 125kV System

Accessory

  • Thermo Scientific Precision Oven
  • Heraeus Vacuum Oven (2)
  • VWR Oven (2)
  • SWC 3000-C Mask Cleaner
  • Ultratech Plate Cleaner

Metrology and Characterization

Imaging

  • Microscope (16)
  • IR Microscope
  • AMSCOPE IN300TB Inverted Microscope
  • Olympus LEXT 3D Material Confocal Microscope
  • Wafer Inspection Camera
  • FEI Quanta 200 3D FIB/SEM
  • Hitachi S-3500H SEM
  • Hitachi S-3700N VP-SEM
  • Hitachi S-4700 FE-SEM
  • LEO 1530 FE-SEM
  • Dage X-Ray XD7600NT

Ellipsometer/Reflectometer

  • Woollam Ellipsometer (2)
  • Woollam M2000 Ellipsometer
  • Woollam Vase Ellipsometer
  • Nanospec Reflectometer (2)

Profilometer

  • Dektak 150 Profilometer (2)
  • Tencor P15 Profilometer (3)
  • Wyko NT2000 Profilometer (3)
  • Wyko Profilometer NT3300

Spectrometer

  • Semprex Spectrometer
  • Thermo Scientific iS50 FT-IR Spectrometer
  • Thermo UV-VIS Spectrometer
  • UV-VIS Spectrophotometer

Misc.

  • KLA Tencor Surfscan 6100
  • SemiTest SCA-2500 Surface Charge Analyzer
  • Bowoptic Stress Measurement
  • Signatone Four-point Probe
  • Signatone Probe Station
  • Veeco Four-point Probe
  • Q600 TGA/DSC

Micromachining

  • MakerBot Replicator 3D Printer
  • Hermes LS500XL CO2 Laser
  • Resonetics IR laser

Thin Film Deposition

ALD

  • Cambridge NanoTech Plasma ALD - Metal
  • Cambridge NanoTech Plasma ALD - Oxide
  • CtrLayer ALD (2)

CVD

  • Schmid APCVD
  • Surrey CNT NanoGrowth
  • Aixtron Black Magic PECVD
  • Oxford ICP-PECVD
  • STS PECVD (2)
  • Unaxis PECVD

Plating

  • Plating Station (4)

Evaporator

  • CHA E-beam Evaporator (2)
  • CtrLayer Anti-Reflective Coater
  • CVC E-Beam Evaporator (2)
  • Denton Explorer - E-beam Evaporator
  • Denton Infinity - E-beam/Filament Evaporator
  • Lesker E-beam Evaporator
  • PVD Filament Evaporator
  • PVD75 Filament Evaporator

Sputterer

  • CtrLayer SDS - Sputterer Deposition Systems
  • CVC DC Sputterer
  • Denton Discovery - RF/DC Sputterer (2)
  • Hummer 5 Gold/Palladium Sputterer
  • Hummer XP Gold Sputterer
  • PVD75 RF Sputterer
  • Unifilm Sputterer

Wet Process

  • CMOS Cleaning Station (2)
  • MEMS Wet Bench
  • Fumehood (3)
  • Solvent Fumehood
  • CMOS Spin Rinse Dryer (2)
  • MEMS Spin Rinse Dryer (SRD)
  • Semitool Spin Rinse Dryer
  • Verteq Spin Rinse Dryer (2)
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