IEN - Micro/Nano Fabrication Facility
SCS Parylene Coater
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Equipment Description

The Georgia Tech SCS Labcoter PDS 2010 is a vacuum system used for conformal vapor deposition of Parylene at room temperature. Typical deposition thicknesses range from 1um to 50um. Parylene-C and Parylene-N dimers are provided.

Applications:
-chemical barrier
-moisture barrier
-structural material
-good dielectric
-bio-compatible/bio-stable

Camera at: https://cleanroom.ien.gatech.edu/camera/44/

Institute Georgia Tech
Department IEN - Micro/Nano Fabrication Facility
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